Linear Motion Systems
Allient | ALIO 6-D Nano Precision® Linear Motion Systems
Under the Allient family, ALIO provides linear motion systems engineered for applications where conventional air-bearing or mechanical-bearing stages cannot meet required precision. ALIO’s linear stages are designed to achieve 6-D Nano Precision®, delivering unmatched straightness, flatness, pitch, yaw, and roll performance—verified through NIST-traceable metrology.
Built using unique manufacturing processes, advanced materials, and precision components, ALIO linear stages routinely outperform traditional air-bearing stages—offering greater stiffness, lower cost of ownership, higher reliability, and superior thermal stability. These attributes make ALIO’s linear systems ideal for high-end applications in semiconductor manufacturing, photonics, metrology, life sciences, laser processing, and precision automation.
ALIO’s linear motion portfolio includes high-precision mechanical bearing stages, linear air-bearing platforms, monolithic linear modules, and multi-axis linear assemblies, all engineered for extremely tight tolerances and long-term repeatability.
Linear X Stages
As an Allient brand, ALIO offers linear X stages designed for reliability, high performance, and flexible motion capability. Available with crossed-roller bearings in both the LM (high-force) and CM (compact) series, these stages support travel...
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Enclosed Monolithic XY Stages
ALIO’s enclosed monolithic XY stages deliver True Nano® precision with optimized straightness, flatness, and orthogonality. Built with direct linear drives and a crossed-roller bearing architecture utilizing anti-creep technology, they offer bidirectional repeatability of ±30 nm...
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Open-Centered Monolithic XY Stages
ALIO’s open-center XY stages provide large apertures, outstanding nanometer-level precision, and excellent orthogonality for scanning, inspection, and optical access applications. Built with a crossed-roller bearing architecture utilizing anti-creep technology. These stages achieve ±50 nm repeatability...
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ThruSight-Focus XYZ Stages
ALIO’s ThruSight-Focus is an ultra-precise, open-center XYZ stage featuring a patented Z-wedge drive that eliminates backlash and increases servo bandwidth. A crossed-roller bearing architecture utilizes anti-creep technology. With ±50 nm repeatability and top-bottom optical access,...
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Asymmetrical Monolithic XY Stages
ALIO, part of Allient, offers asymmetrical monolithic XY stages engineered for applications requiring two travel ranges in an ultra-low-profile format. These unique stages combine linear direct drives, precision crossed-roller bearings utilizing anti-creep technology, and a...
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Micron II Dual Ball Rail X Stages
ALIO’s dual ball-rail Micron II stages combine linear direct drives with dual recirculating ball rails for cost-effective micron-to-nanometer performance. With recirculating linear bearings, travel from 100–500 mm and flexible orientation (horizontal, vertical, inverted), they are...
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Micron II Single Ball Rail X Stages
ALIO’s slim Micron II stages deliver compact, high-precision linear motion for gantry or OEM systems where space is limited. With recirculating linear bearings and travel up to 1 m and ±0.5 μm repeatability, these narrow-form...
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Micron II Extra Large Ball Rail X Stages
As part of Allient, ALIO produces extra-large Micron II X stages designed for extreme travel lengths and massive payloads up to 100 kg. These stages have recirculating linear bearings. Despite long travel ranges (up to...
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Micron II Ball Screw Driven X Stages
ALIO’s Micron II ball-screw driven X stages provide precise, power-off holding capability, ideal for vertical mounting, heavy payloads, or applications requiring safe position retention. With recirculating linear bearings and a frameless torque motor that drives...
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Precision Ball-Screw Drive X Stages
ALIO’s precision ball-screw X stages deliver True Nano® repeatability (±100 nm) and exceptional mechanical stability in noisy electrical environments. With anti-backlash ball screws and optional braking, they provide reliable precision across common travel ranges. Benefits...
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Linear X Air Bearing Stages
ALIO’s linear air bearing X stages offer perfectly frictionless motion on precision planar guideways, enabling extremely straight, flat, and smooth linear travel. With linear motor actuation and air bearings, these stages excel in high-precision scanning...
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Z Focusing Stages
ALIO’s Z-focusing stages deliver precise axial adjustment for imaging, scanning, and optical measurement systems. These stages include a crossed-roller bearing architecture utilizing anti-creep technology. Designed for applications requiring consistent focal control, they support smooth motion...
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Air Bearing Counterbalanced Z Stages
As part of Allient, ALIO offers air-bearing counterbalanced Z stages engineered for ultra-smooth, long-travel vertical motion. With frictionless pneumatics and precision crossed-roller bearings, these stages move heavy payloads with exceptional smoothness and stability. Benefits &...
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Nano Z – Dual Voice Coil Stages with Air Bearings
ALIO’s patented Nano Z® combines air bearings and dual voice-coil motors to eliminate wedge-stage inaccuracies and deliver ultra-smooth, ultra-accurate vertical motion. With nano-scale repeatability and a compact form, it’s ideal for precision optical or semiconductor...
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GeoSymmetric Voice Coil Z Stages
ALIO’s GeoSymmetric™ Z stages use voice-coil direct drives and symmetric mass distribution to achieve True Nano® accuracy in vertical motion. These stages include a crossed-roller bearing architecture utilizing anti-creep technology. With bidirectional repeatability down to...
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High Load and Force Pneumatic Brake Z Stages
Designed under Allient, ALIO’s high-load Z stages use torque-motor-driven ball screws with spring-engage pneumatic brakes to lift 20 – 50 kg while maintaining nanometer-level repeatability. Perfect for heavy metrology tools requiring long travel and high...
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Long Travel Z Stages with Linear Drives
ALIO’s long-travel Z stages deliver extended-range vertical motion using linear motors and precision counterbalancing. With travel up to 200 mm+, these stages maintain excellent vertical accuracy and smoothness for heavy payloads. Benefits & Advantages: Long...
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Configurable Gantries
As part of Allient, ALIO’s configurable gantries are based on proven Micron II platforms utilizing precision recirculating bearing technology. These systems are designed for flexibility, allowing engineers to configure travel length, motor orientation, and bridge...
View Details >>Key Advantages of ALIO Linear Motion Systems:
- Unmatched 6-D Nano Precision® motion performance
- Higher precision than traditional air-bearing stages
- NIST-traceable testing ensures validated nano-level accuracy
- Superior stiffness and thermal stability for demanding environments
- Customizable configurations to match environmental and motion requirements
- Proven reliability across semiconductor, photonics, metrology, and medical applications
With Allient’s global strength and ALIO’s precision engineering expertise, these linear motion systems deliver the performance, consistency, and value required for today’s most advanced production and research platforms