Stages
Linear X Stages
As an Allient brand, ALIO offers linear X stages designed for reliability, high performance, and flexible motion capability. Available with crossed-roller bearings in both the LM (high-force) and CM (compact) series, these stages support travel...
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Enclosed Monolithic XY Stages
ALIO’s enclosed monolithic XY stages deliver True Nano® precision with optimized straightness, flatness, and orthogonality. Built with direct linear drives and a crossed-roller bearing architecture utilizing anti-creep technology, they offer bidirectional repeatability of ±30 nm...
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Open-Centered Monolithic XY Stages
ALIO’s open-center XY stages provide large apertures, outstanding nanometer-level precision, and excellent orthogonality for scanning, inspection, and optical access applications. Built with a crossed-roller bearing architecture utilizing anti-creep technology. These stages achieve ±50 nm repeatability...
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ThruSight-Focus XYZ Stages
ALIO’s ThruSight-Focus is an ultra-precise, open-center XYZ stage featuring a patented Z-wedge drive that eliminates backlash and increases servo bandwidth. A crossed-roller bearing architecture utilizes anti-creep technology. With ±50 nm repeatability and top-bottom optical access,...
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Asymmetrical Monolithic XY Stages
ALIO, part of Allient, offers asymmetrical monolithic XY stages engineered for applications requiring two travel ranges in an ultra-low-profile format. These unique stages combine linear direct drives, precision crossed-roller bearings utilizing anti-creep technology, and a...
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Micron II Dual Ball Rail X Stages
ALIO’s dual ball-rail Micron II stages combine linear direct drives with dual recirculating ball rails for cost-effective micron-to-nanometer performance. With recirculating linear bearings, travel from 100–500 mm and flexible orientation (horizontal, vertical, inverted), they are...
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Micron II Single Ball Rail X Stages
ALIO’s slim Micron II stages deliver compact, high-precision linear motion for gantry or OEM systems where space is limited. With recirculating linear bearings and travel up to 1 m and ±0.5 μm repeatability, these narrow-form...
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Micron II Extra Large Ball Rail X Stages
As part of Allient, ALIO produces extra-large Micron II X stages designed for extreme travel lengths and massive payloads up to 100 kg. These stages have recirculating linear bearings. Despite long travel ranges (up to...
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Micron II Ball Screw Driven X Stages
ALIO’s Micron II ball-screw driven X stages provide precise, power-off holding capability, ideal for vertical mounting, heavy payloads, or applications requiring safe position retention. With recirculating linear bearings and a frameless torque motor that drives...
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Precision Ball-Screw Drive X Stages
ALIO’s precision ball-screw X stages deliver True Nano® repeatability (±100 nm) and exceptional mechanical stability in noisy electrical environments. With anti-backlash ball screws and optional braking, they provide reliable precision across common travel ranges. Benefits...
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Linear X Air Bearing Stages
ALIO’s linear air bearing X stages offer perfectly frictionless motion on precision planar guideways, enabling extremely straight, flat, and smooth linear travel. With linear motor actuation and air bearings, these stages excel in high-precision scanning...
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Z Focusing Stages
ALIO’s Z-focusing stages deliver precise axial adjustment for imaging, scanning, and optical measurement systems. These stages include a crossed-roller bearing architecture utilizing anti-creep technology. Designed for applications requiring consistent focal control, they support smooth motion...
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Air Bearing Counterbalanced Z Stages
As part of Allient, ALIO offers air-bearing counterbalanced Z stages engineered for ultra-smooth, long-travel vertical motion. With frictionless pneumatics and precision crossed-roller bearings, these stages move heavy payloads with exceptional smoothness and stability. Benefits &...
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Nano Z – Dual Voice Coil Stages with Air Bearings
ALIO’s patented Nano Z® combines air bearings and dual voice-coil motors to eliminate wedge-stage inaccuracies and deliver ultra-smooth, ultra-accurate vertical motion. With nano-scale repeatability and a compact form, it’s ideal for precision optical or semiconductor...
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GeoSymmetric Voice Coil Z Stages
ALIO’s GeoSymmetric™ Z stages use voice-coil direct drives and symmetric mass distribution to achieve True Nano® accuracy in vertical motion. These stages include a crossed-roller bearing architecture utilizing anti-creep technology. With bidirectional repeatability down to...
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High Load and Force Pneumatic Brake Z Stages
Designed under Allient, ALIO’s high-load Z stages use torque-motor-driven ball screws with spring-engage pneumatic brakes to lift 20 – 50 kg while maintaining nanometer-level repeatability. Perfect for heavy metrology tools requiring long travel and high...
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Long Travel Z Stages with Linear Drives
ALIO’s long-travel Z stages deliver extended-range vertical motion using linear motors and precision counterbalancing. With travel up to 200 mm+, these stages maintain excellent vertical accuracy and smoothness for heavy payloads. Benefits & Advantages: Long...
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Planar XY Air Bearing Stages
ALIO’s patented planar XY air bearing stages deliver unmatched 6-D Nano Precision® with sub-micron accuracy over travel ranges up to several meters. Using a common granite reference, these systems achieve extraordinary flatness and ±100 nm...
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