Micron II Ball Screw Driven X Stages
ALIO’s Micron II ball-screw driven X stages provide precise, power-off holding capability, ideal for vertical mounting, heavy payloads, or applications requiring safe position retention. With recirculating linear bearings and a frameless torque motor that drives a precision ball screw with anti-backlash nut, achieving ±1 μm repeatability.
Benefits & Advantages:
- Holds position without power – ideal for vertical loads
- ±1 µm bidirectional repeatability
- Optional pneumatic or electric brakes
- Robust dual-ball-rail bearings for stability
- Perfect for heavy or safety-critical systems
Market Segments & Applications:
Photonics/Micro-Assembly: Laser Processing, Additive Manufacturing, Electronics Assembly
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing, Optics: Assembly, and Testing
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (µm)+/- 1
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Displacement Accuracy (µm)+/- 2 - 24
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Linear Velocity (m/sec)0.1
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Travel X (mm)50 - 500
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Acceleration (G)0.5
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Payload Capacity (kg)70
*Analog Output with 4096 Interpolation. See datasheet for Digital Output and Absolute options.
Need Assistance? Call: 716-242-7535