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Open-Center Rotary Stages by Allient

Open-Center Rotary Stages

ALIO, an Allient brand, engineers open-center rotary stages featuring tangential linear direct drives and precision angular-contact bearings for high-accuracy rotation with large apertures. These systems offer ±7.5° travel, ideal for applications requiring through-axis access and rigid, stable actuation.

Benefits & Advantages:

  • Large open-center aperture for tooling or optical access
  • High rigidity and low error motion
  • Linear direct-drive actuation for crisp angular performance
  • Ideal for scanning or inspection operations

Market Segments & Applications:
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing.
Metrology: Inspection tools, Microscopy, Nano Metrology and Sensor Calibration, Optics: Assembly, and Testing.
Life and Health Science: Digital Pathology, Spatial Biology/Genome Sequencing, Medical and Clinical device Manufacturing/Drug Discovery, Next Generation Sequencing (NGS), High Content Screening, Automated Library Prep.

Specifications Overview

  • Rated Torque θZ (Nm)
    5 - 10.8
  • Diameter (mm)
    200, 420
  • Angular Resolution θZ (arc-sec)
    0.002 - 10
  • Angular Accuracy (arc-sec)
    +/-1
  • Rotational Velocity θZ (deg/sec)
    1,500, 900
  • Acceleration θZ (deg/sec^2)
    2,000,000, 800,000
  • Payload Capacity (kg)
    40
  • Height (mm)
    36 - 40
  • Aperture Diameter (mm)
    100 - 330
  • Rated Current (Arms)
    3.18
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