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Stages

As part of Allient, ALIO delivers precision motion systems engineered for applications requiring true micron-level accuracy and nanometer-level motion control. Our ultra-precision stages and nanopositioning platforms provide exceptional repeatability and stability, offering customers a precision motion solution tailored to their exact requirements—far superior to the one-size-fits-all motion stages commonly found on the market.

With fully vertically integrated manufacturing, ALIO controls every aspect of production, including design, machining, assembly, and metrology, with 100% part verification as standard. This end-to-end approach ensures unmatched reliability and long-term performance across ultra-precision motion applications such as semiconductor fabrication, medical device manufacturing, metrology, photonics, and advanced automation.

Whether choosing an ALIO off-the-shelf precision motion platform or a custom-engineered motion control system, customers benefit from higher throughput and consistently superior nanopositioning performance. Each system is optimized to deliver the accuracy, speed, and repeatability required for today’s most demanding precision automation environments.

1 - 5 of 5 products

Linear X Stages

As an Allient brand, ALIO offers linear X stages designed for reliability, high performance, and flexible motion capability. Available with crossed-roller bearings in both the LM (high-force) and CM (compact) series, these stages support travel...

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Standard Hybrid Hexapods

The Standard Hybrid Hexapod® from ALIO offers revolutionary 6-DOF precision by replacing traditional Stewart platform kinematics with a monolithic XY plus tripod architecture. This design eliminates backlash, pitch errors, and friction, delivering superior nano-precision at...

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Enclosed Monolithic XY Stages

ALIO’s enclosed monolithic XY stages deliver True Nano® precision with optimized straightness, flatness, and orthogonality. Built with direct linear drives and a crossed-roller bearing architecture utilizing anti-creep technology, they offer bidirectional repeatability of ±30 nm...

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MINI Hybrid Hexapods

The MINI Hybrid Hexapod® from Allient’s ALIO brand provides full 6-DOF nano-precision in a compact, scalable architecture ideal for small-format optical and imaging systems. While this hexapod can be compared to traditional Stewart platforms, it...

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Open-Centered Monolithic XY Stages

ALIO’s open-center XY stages provide large apertures, outstanding nanometer-level precision, and excellent orthogonality for scanning, inspection, and optical access applications. Built with a crossed-roller bearing architecture utilizing anti-creep technology. These stages achieve ±50 nm repeatability...

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Angulares Tip-Tilt Range Hybrid Hexapods

As part of Allient, ALIO’s Angulares™ Hybrid Hexapod provides the widest angular travel range of any 6-DOF positioner on the market, delivering ±60° tip/tilt with unlimited XY travel and full continuous 360° theta-Z. More enhanced...

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ThruSight-Focus XYZ Stages

ALIO’s ThruSight-Focus is an ultra-precise, open-center XYZ stage featuring a patented Z-wedge drive that eliminates backlash and increases servo bandwidth. A crossed-roller bearing architecture utilizes anti-creep technology. With ±50 nm repeatability and top-bottom optical access,...

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Asymmetrical Monolithic XY Stages

ALIO, part of Allient, offers asymmetrical monolithic XY stages engineered for applications requiring two travel ranges in an ultra-low-profile format. These unique stages combine linear direct drives, precision crossed-roller bearings utilizing anti-creep technology, and a...

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Vacuum Hybrid Hexapods

As part of Allient, ALIO’s Vacuum Hybrid Hexapod is engineered specifically for ultra-high vacuum (UHV) environments where traditional stacked motion systems fall short. Instead of layering multiple stages, increasing height, footprint, outgassing surface area, and...

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Micron II Dual Ball Rail X Stages

ALIO’s dual ball-rail Micron II stages combine linear direct drives with dual recirculating ball rails for cost-effective micron-to-nanometer performance. With recirculating linear bearings, travel from 100–500 mm and flexible orientation (horizontal, vertical, inverted), they are...

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Micron II Single Ball Rail X Stages

ALIO’s slim Micron II stages deliver compact, high-precision linear motion for gantry or OEM systems where space is limited. With recirculating linear bearings and travel up to 1 m and ±0.5 μm repeatability, these narrow-form...

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Micron II Extra Large Ball Rail X Stages

As part of Allient, ALIO produces extra-large Micron II X stages designed for extreme travel lengths and massive payloads up to 100 kg. These stages have recirculating linear bearings. Despite long travel ranges (up to...

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Micron II Ball Screw Driven X Stages

ALIO’s Micron II ball-screw driven X stages provide precise, power-off holding capability, ideal for vertical mounting, heavy payloads, or applications requiring safe position retention. With recirculating linear bearings and a frameless torque motor that drives...

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Precision Ball-Screw Drive X Stages

ALIO’s precision ball-screw X stages deliver True Nano® repeatability (±100 nm) and exceptional mechanical stability in noisy electrical environments. With anti-backlash ball screws and optional braking, they provide reliable precision across common travel ranges. Benefits...

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Linear X Air Bearing Stages

ALIO’s linear air bearing X stages offer perfectly frictionless motion on precision planar guideways, enabling extremely straight, flat, and smooth linear travel. With linear motor actuation and air bearings, these stages excel in high-precision scanning...

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Z Focusing Stages

ALIO’s Z-focusing stages deliver precise axial adjustment for imaging, scanning, and optical measurement systems. These stages include a crossed-roller bearing architecture utilizing anti-creep technology. Designed for applications requiring consistent focal control, they support smooth motion...

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Air Bearing Counterbalanced Z Stages

As part of Allient, ALIO offers air-bearing counterbalanced Z stages engineered for ultra-smooth, long-travel vertical motion. With frictionless pneumatics and precision crossed-roller bearings, these stages move heavy payloads with exceptional smoothness and stability. Benefits &...

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Nano Z – Dual Voice Coil Stages with Air Bearings

ALIO’s patented Nano Z® combines air bearings and dual voice-coil motors to eliminate wedge-stage inaccuracies and deliver ultra-smooth, ultra-accurate vertical motion. With nano-scale repeatability and a compact form, it’s ideal for precision optical or semiconductor...

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