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Angulares Tip-Tilt Range Hybrid Hexapod 6-DOF precision motion stage with extended angular travel for optical alignment applications

Angulares Tip-Tilt Range Hybrid Hexapods

As part of Allient, ALIO’s Angulares™ Hybrid Hexapod provides the widest angular travel range of any 6-DOF positioner on the market, delivering ±60° tip/tilt with unlimited XY travel and full continuous 360° theta-Z. More enhanced than a traditional Stewart platform, it replaces traditional kinematics with an advanced design that features crossed-roller bearings and direct-drive motors, offering <100 nm repeatability.

Benefits & Advantages:

  • Industry-leading ±60° angular travel
  • Unlimited XY travel, Z to 208 mm
  • Working volume up to 5x greater than competition
  • <100 nm XYZ repeatability
  • Ultra-stiff, zero-backlash architecture
  • Fully programmable Tool-Center-Point (TCP) locations and Rotated Coordinate System (RCS) for complex workflows

Market Segments & Applications
Semiconductor: Wafer X-Ray, Die Bonding, Fiber-to-Chip Bonding
Photonics: Optical Module Assembly and Testing, Lens Alignment, Laser Processing
Industrial Automation: Additive Manufacturing, Microelectronics Assembly

Specifications Overview

  • Max. Travel XY/Z/A/B/G (mm/mm/deg/deg/deg)
    300+/62/60/60/360
  • Yaw Travel (deg)
    360 continuous
  • Resolution XY (nm)
    ~4.88
  • Resolution Z (nm)
    ~4.88
  • Pitch and Roll Angular Resolution (arc-sec)
    ~0.15
  • Yaw Angular Resolution (arc-sec)
    0.04
  • Payload Capacity (kg)
    10
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Need Assistance? Call: 716-242-7535

Documents & Resources

Datasheets