Home > Shop > MINI Hybrid Hexapods

MINI Hybrid Hexapod compact 6-DOF precision motion stage with integrated XY platform and parallel Z, pitch and roll axes by Allient

MINI Hybrid Hexapods

The MINI Hybrid Hexapod® from Allient’s ALIO brand provides full 6-DOF nano-precision in a compact, scalable architecture ideal for small-format optical and imaging systems. While this hexapod can be compared to traditional Stewart platforms, it replaces traditional kinematics and stands out for its ability to maintain nanometer-level incremental motion within a small footprint. The combination of exceptional stiffness and precision, make it a superior choice for applications that require high accuracy in constrained spaces.

Benefits & Advantages:

  • Compact with 54,000 mm² working volume
  • Scalable architecture with multiple XY and Z drive options
  • Nanometer/arc-sec incremental motion
  • Ideal for small optics & camera modules
  • High stiffness in miniature footprint
  • Fully programmable Tool-Center-Point (TCP) locations and Rotated Coordinate System (RCS) for complex workflows

Market Segments & Applications
Semiconductor: Wafer X-Ray, Die Bonding, Fiber-to-Chip Bonding
Photonics: Optical Module Assembly and Testing, Lens Alignment, Laser Processing
Industrial Automation: Additive Manufacturing, Microelectronics Assembly

Specifications Overview

  • Max. Travel XY/Z/A/B/G (mm/mm/deg/deg/deg)
    200/15/20/20/360
  • Yaw Travel (deg)
    360 continuous
  • Resolution XY (nm)
    ~4.88
  • Resolution Z (nm)
    ~4.88
  • Pitch and Roll Angular Resolution (arc-sec)
    < 0.04
  • Yaw Angular Resolution (arc-sec)
    0.04
  • Payload Capacity (kg)
    16.3
Need More Info? Click Here

Need Assistance? Call: 716-242-7535

Documents & Resources

Datasheets