Micron II Single Ball Rail X Stages
ALIO’s slim Micron II stages deliver compact, high-precision linear motion for gantry or OEM systems where space is limited. With recirculating linear bearings and travel up to 1 m and ±0.5 μm repeatability, these narrow-form stages offer reliable precision at an accessible cost.
Benefits & Advantages:
- Only 72 mm wide × 57 mm tall
- Travel to 1 m in compact form
- ±0.5 μm repeatability
- Ideal for multi-axis gantry systems
- Excellent straightness and flatness
Market Segments & Applications:
Metrology: Inspection tools, Microscopy, Nano Metrology and Sensor Calibration, Optics: Assembly, and Testing, Lab Automation Equipment
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (µm)+/- 0.5
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Displacement Accuracy (µm)+/- 1 - 40
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Linear Velocity (m/sec)2
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Travel X (mm)100 - 1,000
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Acceleration (G)4
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Payload Capacity (kg)32
*Analog Output with 4096 Interpolation. See datasheet for Digital Output and Absolute options.
Need Assistance? Call: 716-242-7535