ThruSight-Focus XYZ Stages
ALIO’s ThruSight-Focus is an ultra-precise, open-center XYZ stage featuring a patented Z-wedge drive that eliminates backlash and increases servo bandwidth. A crossed-roller bearing architecture utilizes anti-creep technology. With ±50 nm repeatability and top-bottom optical access, it’s ideal for advanced imaging and micro-processing.
Benefits & Advantages:
- Open-center architecture for dual-sided access
- Z-wedge drive for backlash-free vertical motion
- ±50 nm repeatability across XYZ
- Compact footprint for OEM & lab tools
- Ideal for imaging, machining, probing, and assembly
Market Segments & Applications:
Life and Health Science: Digital Pathology, Spatial Biology/Genome Sequencing, Medical and Clinical Device Manufacturing/Drug Discovery, Next Generation Sequencing (NGS), High Content Screening, Automated Library Prep
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing
Photonics/Micro-Assembly: Laser Processing, Additive Manufacturing, Electronics Assembly and Metrology, Laser Lens Array (Lensing) Assemblies, 6K Lens Packaging, Hard Disk and High-Density Tape Storage, Ultra-Precision Machining
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (nm)+/- 50 nm (X), +/- 50 nm (Y), +/-1 µm (Z)
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Displacement Accuracy (µm)+/- 0.7 - 20
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Travel X (mm)118
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Travel Y (mm)64
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Travel Z (mm)5.04
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Acceleration (G)0.2, 0.3, 0.02
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Payload Capacity (kg)1.5
*Biss-C Absolute 26-bit. See datasheet for Digital AquadB Output.
Need Assistance? Call: 716-242-7535