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Standard Hybrid Hexapod 6-DOF precision motion stage with integrated XY platform and parallel kinematic Z, pitch and roll axes

Standard Hybrid Hexapods

The Standard Hybrid Hexapod® from ALIO offers revolutionary 6-DOF precision by replacing traditional Stewart platform kinematics with a monolithic XY plus tripod architecture. This design eliminates backlash, pitch errors, and friction, delivering superior nano-precision at any working point.

Benefits & Advantages:

  • Nanometer/arc-sec precision
  • Zero-backlash, high-stiffness design
  • True 6-DOF control with simplified kinematics
  • Larger working volume than traditional hexapods (up to 5x)
  • Ideal for high-precision automation and inspection
  • Fully programmable Tool-Center-Point (TCP) locations and Rotated Coordinate System (RCS) for complex workflows

Market Segments & Applications
Semiconductor: Wafer X-Ray, Die Bonding, Fiber-to-Chip Bonding
Photonics: Optical Module Assembly and Testing, Lens Alignment, Laser Processing
Industrial Automation: Additive Manufacturing, Microelectronics Assembly

Specifications Overview

  • Max. Travel XY/Z/A/B/G (mm/mm/deg/deg/deg)
    300+/206/36/36/INF
  • Yaw Travel (deg)
    360 continuous
  • Resolution XY (nm)
    ~5
  • Resolution Z (nm)
    ~5
  • Pitch and Roll Angular Resolution (arc-sec)
    ~0.01
  • Yaw Angular Resolution (arc-sec)
    ~0.01
  • Payload Capacity (kg)
    20
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Need Assistance? Call: 716-242-7535

Documents & Resources

Datasheets