Rotational Air Bearing Stages

As part of Allient, ALIO’s rotational air bearing stages deliver frictionless, wear-free rotary motion for the most demanding high-precision environments. With near-perfect 360° motion and minimal wobble, eccentricity, or runout, these stages support both continuous rotation and precise step-and-settle positioning.

Benefits & Advantages:

• Zero mechanical contact for ultra-smooth motion
• Extremely low wobble, eccentricity, and runout
• High-speed capability without accuracy loss
• Torque-motor driven for precision at any speed
• Ideal for vertical or horizontal mounting

Market Segments & Applications:
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing.
Metrology: Inspection tools, Microscopy, Nano Metrology and Sensor Calibration, Optics: Imaging, Assembly, and Testing.