Precision Ball-Screw Drive X Stages
ALIO’s precision ball-screw X stages deliver True Nano® repeatability (±100 nm) and exceptional mechanical stability in noisy electrical environments. With anti-backlash ball screws and optional braking, they provide reliable precision across common travel ranges.
Benefits & Advantages:
- ±100 nm repeatability
- Straightness/flatness <5 μm (down to 1 μm optional)
- Anti-backlash nut for zero lost motion
- Available for vacuum/cleanroom environments
- Travel ranges: 30 – 200 mm
Market Segments & Applications:
Metrology: Inspection Tools, Microscopy, Nano Metrology and Sensor Calibration, Optics: Assembly, and Testing
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing
Life and Health Science: Digital Pathology, Spatial Biology/Genome Sequencing, Medical and Clinical Device Manufacturing/Drug Discovery, Next Generation Sequencing (NGS), High Content Screening, Automated Library Prep
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (nm)+/- 100
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Displacement Accuracy (µm)+/- 0.3 - 4
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Travel X (mm)60 - 300
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Acceleration (G)1
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Payload Capacity (kg)25
*Analog Output with 4096 Interpolation. See datasheet for Digital Output and Absolute options.
Need Assistance? Call: 716-242-7535