Open-Centered Monolithic XY Stages
ALIO’s open-center XY stages provide large apertures, outstanding nanometer-level precision, and excellent orthogonality for scanning, inspection, and optical access applications. Built with a crossed-roller bearing architecture utilizing anti-creep technology. These stages achieve ±50 nm repeatability and travel up to 400 mm, they offer superior throughput and accuracy.
Benefits & Advantages:
- Large aperture for top-bottom access
- ±50 nm repeatability
- Linear direct drives & crossed-roller bearings
- High straightness, flatness, and orthogonality
- Vacuum & cleanroom compatible
Market Segments & Applications:
Metrology: Inspection Tools, Microscopy, Nano Metrology and Sensor Calibration, Optics: Assembly, and Testing
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (nm)+/- 50
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Displacement Accuracy (µm)+/- 0.5 - 16
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Linear Velocity - Top Stage1.4 - 2.0
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Linear Velocity - Bottom Stage0.8 - 1.3
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Travel X (mm)100 - 400
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Travel Y (mm)100 - 400
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Acceleration - Top Stage (G)1.8 - 4.0
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Acceleration - Bottom Stage (G)0.6 - 1.6
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Payload Capacity (kg)25 - 50
*Analog Output with 4096 Interpolation. See datasheet for Digital Output and Absolute options.
Need Assistance? Call: 716-242-7535