Nano Z – Dual Voice Coil Stages with Air Bearings
ALIO’s patented Nano Z® combines air bearings and dual voice-coil motors to eliminate wedge-stage inaccuracies and deliver ultra-smooth, ultra-accurate vertical motion. With nano-scale repeatability and a compact form, it’s ideal for precision optical or semiconductor workflows.
Benefits & Advantages:
- Negligible friction from air bearings
- Nano-level accuracy and repeatability
- Ideal for heavy vertical loads
- Precise alignment: minimal pitch/yaw/roll
- Footprint allows placement directly under payload
Market Segments & Applications:
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing
Photonics/Micro-Assembly: Laser Processing, Additive Manufacturing, Electronics Assembly and Metrology, Laser Lens Array (Lensing) Assemblies, 6K Lens Packaging, Hard Disk and High-Density Tape Storage, Ultra-Precision Machining
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (nm)+/- 45 - 150
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Displacement Accuracy (µm)+/- 0.2 - 7
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Linear Velocity (m/sec)0.1 - 0.2
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Travel Z (mm)24
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Acceleration (G)1 - 3
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Payload Capacity (kg)20
*Analog Output with 4096 Interpolation. See datasheet for Digital Output options.
Need Assistance? Call: 716-242-7535