Linear X Air Bearing Stages
ALIO’s linear air bearing X stages offer perfectly frictionless motion on precision planar guideways, enabling extremely straight, flat, and smooth linear travel. With linear motor actuation and air bearings, these stages excel in high-precision scanning over long travel distances.
Benefits & Advantages:
- Zero-friction operation for exceptional motion fidelity
- Superior straightness and flatness
- Ideal for precision scanning and inspection
- No particle generation – cleanroom compatible
- High-speed, high-accuracy positioning
Market Segments & Applications:
Photonics/Micro-Assembly: Laser Processing, Additive Manufacturing, Electronics Assembly
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing, Optics: Assembly and Testing
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (nm)+/- 30
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Displacement Accuracy (µm)+/- 0.5 - 3
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Linear Velocity (m/sec)2
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Travel X (mm)100 - 10,000
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Acceleration (G)2
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Payload Capacity (kg)12.5 - 26
*Analog Output with 4096 Interpolation. See datasheet for Digital Output options.
Need Assistance? Call: 716-242-7535