GeoSymmetric Voice Coil Z Stages

ALIO’s GeoSymmetric™ Z stages use voice-coil direct drives and symmetric mass distribution to achieve True Nano® accuracy in vertical motion. These stages include a crossed-roller bearing architecture utilizing anti-creep technology. With bidirectional repeatability down to ±45 nm and multiple counterbalance options, they outperform traditional Z-wedge architectures by 4–10×.

Benefits & Advantages:

• ±45 nm repeatability
• Extremely high stiffness & dynamic response
• Symmetric design minimizes pitch/yaw/roll
• Travel 6 – 70 mm; loads up to 30 kg
• Ideal for high-precision optical and semiconductor tasks

Market Segments & Applications:
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing
Photonics/Micro-Assembly: Laser Processing, Additive Manufacturing, Electronics Assembly and Metrology, Laser Lens Array (Lensing) Assemblies, 6K Lens Packaging, Hard Disk and High-Density Tape Storage, Ultra-Precision Machining
Life and Health Science: Digital Pathology, Spatial Biology/Genome Sequencing, Medical and Clinical Device Manufacturing/Drug Discovery, Next Generation Sequencing (NGS), High Content Screening, Automated Library Prep.