Enclosed Monolithic XY Stages
ALIO’s enclosed monolithic XY stages deliver True Nano® precision with optimized straightness, flatness, and orthogonality. Built with direct linear drives and a crossed-roller bearing architecture utilizing anti-creep technology, they offer bidirectional repeatability of ±30 nm and smooth motion ideal for scanning and high-throughput operations.
Benefits & Advantages:
- True Nano® precision in a compact monolithic design
- ±30 nm repeatability for scanning or step-and-settle motion
- Travel from 30 – 400 mm
- Available in LM (high-force) or CM (low-profile) series
- Vacuum and cleanroom configurations available
Market Segments & Applications:
Life and Health Science: Digital Pathology, Spatial Biology/Genome Sequencing, Medical and Clinical Device Manufacturing/Drug Discovery, Next Generation Sequencing (NGS), High Content Screening, Automated Library Prep
Photonics/Micro-Assembly: Laser Processing, Additive Manufacturing, Electronics Assembly
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing,
Optics: Assembly and Testing
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (nm)+/- 30
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Displacement Accuracy (µm)+/- 0.5 - 5
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Linear Velocity - Top Stage1.2 - 1.7
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Linear Velocity - Bottom Stage0.7 - 1.2
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Travel X (mm)30 - 450
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Travel Y (mm)30 - 450
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Acceleration - Top Stage (G)1.4 - 11
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Acceleration - Bottom Stage (G)0.5 - 4
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Payload Capacity (kg)10 - 80
*Analog Output with 4096 Interpolation. See datasheet for Digital Output and Absolute options.
Need Assistance? Call: 716-242-7535