Crossed-Roller Bearing Rotary Stages
As part of Allient, ALIO provides crossed-roller bearing rotary stages engineered for extreme stiffness, high acceleration, and nanometer-level rotary precision. These stages deliver industry-leading repeatability (±0.2 arc-sec) with radial and axial runout as low as 5 microns, making them ideal for demanding precision workloads.
Benefits & Advantages:
- High stiffness with frameless torque motors
- Radial/axial runout as low as <5 μm
- Supports large masses and offset loads
- Wide diameter range (80–300 mm)
- Vacuum rotary-union options for specialty applications
Market Segments & Applications:
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing.
Photonics/Micro Assembly: Laser processing, Additive manufacturing, Electronics Assembly and Metrology, Laser Lens Array (Lensing) Assemblies, 6K Lens Packaging, Hard Disk and High-Density Tape Storage.
Specifications Overview
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Rated Torque θZ (Nm)0.2 - 2.6
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Diameter (mm)56 - 104
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Angular Resolution θZ (arc-sec)0.005 - 40
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Angular Accuracy (arc-sec)+/-3
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Rotational Velocity θZ (deg/sec)3,000 - 8,000
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Acceleration θZ (deg/sec^2)60,000 - 400,000
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Payload Capacity (kg)2.5 - 12
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Aperture Diameter (mm)8 - 32
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Height (mm)62 - 80
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Rated Current (Arms)2.31 - 5.61
Need Assistance? Call: 716-242-7535