Asymmetrical Monolithic XY Stages
ALIO, part of Allient, offers asymmetrical monolithic XY stages engineered for applications requiring two travel ranges in an ultra-low-profile format. These unique stages combine linear direct drives, precision crossed-roller bearings utilizing anti-creep technology, and a 3-plate structure for maximum orthogonality and stability.
Benefits & Advantages:
- Unique asymmetric design for mixed-travel requirements
- Exceptional XY orthogonality using monolithic structure
- Ultra-low profile for tight integration spaces
- Direct-drive actuation for smooth, precise scanning
- Industry-exclusive solution for compact precision XY motion
Market Segments & Applications:
Metrology: Inspection tools, Microscopy, Nano Metrology and Sensor Calibration
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing
Photonics/Micro-Assembly: Laser Processing, Additive Manufacturing, Electronics Assembly and Metrology, Laser Lens Array (Lensing) Assemblies, 6K Lens Packaging, Hard Disk and High-Density Tape Storage
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (nm)+/- 30
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Displacement Accuracy (µm)+/- 0.5 - 5
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Linear Velocity (m/sec)1
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Travel X (mm)30 - 300
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Travel Y (mm)30 - 300
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Acceleration (G)0.7
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Payload Capacity (kg)30
*Analog Output with 4096 Interpolation. See datasheet for Digital Output options.
Need Assistance? Call: 716-242-7535