Air Bearing Counterbalanced Z Stages
As part of Allient, ALIO offers air-bearing counterbalanced Z stages engineered for ultra-smooth, long-travel vertical motion. With frictionless pneumatics and precision crossed-roller bearings, these stages move heavy payloads with exceptional smoothness and stability.
Benefits & Advantages:
- Air-bearing counterbalance for zero-friction lift
- Supports payloads up to 25 kg
- Long-travel vertical motion (200 mm+)
- High precision with linear encoders
- Ideal for heavy optical or metrology payloads
Market Segments & Applications:
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing
Photonics/Micro-Assembly: Laser Processing, Additive Manufacturing, Electronics Assembly and Metrology, Laser Lens Array (Lensing) Assemblies, 6K Lens Packaging, Hard Disk and High-Density Tape Storage, Ultra-Precision Machining
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (nm)+/- 45 - 75
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Displacement Accuracy (µm)+/- 0.2 - 8
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Linear Velocity (m/sec)0.2
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Travel Z (mm)6 - 50
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Acceleration (G)1 - 3
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Payload Capacity (kg)10
*Analog Output with 4096 Interpolation. See datasheet for Digital AqB Output and Absolute options.
Need Assistance? Call: 716-242-7535