Long Travel Z Stages with Linear Drives
ALIO’s long-travel Z stages deliver extended-range vertical motion using linear motors and precision counterbalancing. With travel up to 200 mm+, these stages maintain excellent vertical accuracy and smoothness for heavy payloads.
Benefits & Advantages:
- Long travel (25 – 200+ mm)
- Magnetic spring or air-bearing counterbalance
- Precision crossed-roller bearings
- Supports payloads up to 25 kg
- Excellent geometric stability
Market Segments & Applications:
Semiconductor: Lithography, Microelectronics: Assembly and Testing, Wafer Handling, Wafer Mask Inspection/Processing Tools, LED Manufacturing, Inspection, and Testing
Photonics/Micro-Assembly: Laser Processing, Additive Manufacturing, Electronics Assembly and Metrology, Laser Lens Array (Lensing) Assemblies, 6K Lens Packaging, Hard Disk and High-Density Tape Storage, Ultra-Precision Machining
Specifications Overview
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*Linear Resolution (nm)<5
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Bi-Directional Repeatability (nm)+/- 45 - 75
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Displacement Accuracy (µm)+/- 0.2 - 5
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Linear Velocity (m/sec)0.25 - 1
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Travel Z (mm)50 - 200
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Acceleration (G)2.5 - 6
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Payload Capacity (kg)6.1 - 25
*Analog Output with 4096 Interpolation. See datasheet for Digital Output and Absolute options.
Need Assistance? Call: 716-242-7535